With its help, you can produce large-size chips up to 350 nm. The next step will be a lithograph at 130 nm
Deputy Minister of Industry and Trade of the Russian Federation Vasily Shpak reported that the first Russian lithograph has already been created and is being tested. Shpak mentioned plans to produce a domestic lithograph at the end of last year. So far, equipment of this level of complexity is assembled by only a few global players, including the Dutch ASML, Canon and Nikon.
«We assembled and made the first domestic lithograph. It is now undergoing testing as part of the technological line in Zelenograd», – the deputy minister said on the sidelines of the CIPR conference taking place in Nizhny Novgorod. True, the Russian lithograph is not intended to produce advanced 5- or 3-nm single-chip systems that are used in modern smartphones. It allows you to create chips up to 350 nm in size – These are large-scale solutions that are used in the automotive industry, energy and telecommunications.
Vasily Shpak also said that a Russian lithograph, which can create chips measuring 130 nanometers, is going to be released in 2026. The next step will be the development of a 90-nanometer lithograph, and then equipment supporting finer technical processes, the deputy minister added.